White Paper - PFAS Research Priorities for Semiconductor Manufacturing

The Industrial Alliance for Semiconductors is a European Commission initiative designed to strengthen collaboration across the semiconductor value chain and reinforce Europe’s technological sovereignty. By bringing together industry leaders, research organisations, and policymakers, the Alliance aims to identify gaps, align priorities, and accelerate innovation in microelectronics.

To address the wide range of challenges facing the sector, the Alliance is structured into several dedicated working groups. These groups focus on specific topics such as supply chains, skills, and sustainability, enabling targeted discussions and coordinated action. Among them, the PFAS Working Group plays a key role in addressing the use of per- and polyfluoroalkyl substances (PFAS) in semiconductor manufacturing.

PFAS are widely used in chip production due to their unique properties, including high thermal and chemical stability, low surface tension, and excellent electrical performance. These characteristics make them essential for processes such as photolithography, plasma etching, wafer processing, and advanced packaging.

However, PFAS are also highly persistent in the environment, raising concerns about their long-term impact on ecosystems and human health. Managing and eventually reducing their use presents a significant challenge, as alternatives must meet strict technical requirements without compromising performance or reliability.

In response, the PFAS Working Group under the Industrial Alliance for Semiconductors has developed a white paper outlining key research priorities for Europe. The document emphasises that addressing PFAS-related challenges requires coordinated, long-term investment in research and innovation.

Three main priority areas are identified:

• Detection and monitoring: advancing real-time, in-line technologies to identify PFAS across industrial processes and waste streams.

• Abatement and circularity: developing more effective systems to capture, destroy, and potentially recycle PFAS in manufacturing environments.

• Alternatives development: accelerating the discovery and validation of high-performance substitutes for critical semiconductor applications.

The white paper also highlights the importance of collaboration across the entire semiconductor ecosystem—from material suppliers to equipment manufacturers and research institutions—to ensure that solutions can be implemented at scale.

By defining a shared research agenda, the Industrial Alliance for Semiconductors and its PFAS Working Group provide a roadmap for Europe to maintain technological leadership while addressing pressing environmental challenges.

To explore the full set of recommendations and insights, read the complete white paper here:
https://allpros.eu/resources/white-paper-pfas-research-priorities-semiconductor-manufacturing